MEMS devices including MEMS dies and connectors thereto

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United States of America Patent

PATENT NO 9919914
SERIAL NO

15160884

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Abstract

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An embodiment is MEMS device including a first MEMS die having a first cavity at a first pressure, a second MEMS die having a second cavity at a second pressure, the second pressure being different from the first pressure, and a molding material surrounding the first MEMS die and the second MEMS die, the molding material having a first surface over the first and the second MEMS dies. The device further includes a first set of electrical connectors in the molding material, each of the first set of electrical connectors coupling at least one of the first and the second MEMS dies to the first surface of the molding material, and a second set of electrical connectors over the first surface of the molding material, each of the second set of electrical connectors being coupled to at least one of the first set of electrical connectors.

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Patent Owner(s)

Patent OwnerAddress
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD8 LI-HSIN RD 6 HSINCHU SCIENCE PARK HSINCHU 300-78

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Chun-Wen Zhubei, TW 259 3778
Peng, Jung-Huei Jhubei, TW 101 1280
Teng, Yi-Chuan Zhubei, TW 54 510
Tsai, Hung-Chia Taichung, TW 18 453
Tsai, Shang-Ying Pingzhen, TW 95 886

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