Positioning device
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United States of America Patent
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Mar 20, 2018
Grant Date -
Jan 5, 2017
app pub date -
Sep 8, 2014
filing date -
Dec 18, 2013
priority date (Note) -
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Abstract
A positioning device is adapted for positioning a tool at a setpoint position on a flat substrate in an X-Y plane, the tool exerting a process force in its axial direction perpendicularly onto the substrate. The tool includes a multicomponent force sensor to measure unwanted process-force components in the lateral direction. The setpoint position of the tool is correctable by the positioning device such that the lateral process-force components are minimized.
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