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• 15 United States
• 10 France
• 8 Japan
• 7 China
• 5 Korea
• 2 Other

Patent Owner(s)

Patent Owner	Address
MAXAR SPACE LLC	3825 FABIAN WAY PALO ALTO CA 94303

International Classification(s)

• H04B:TRANSMISSION

Inventor(s)

Inventor Name	Address	# of filed Patents	Total Citations
Fang, Jun	San Jose, US	162	1026
# of filed Patents : 162 Total Citations : 1026

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Patent Citation Ranking

• 2 Citation Count
• H04B Class

• 20.43 % this patent is cited more than
• 7 Age

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Maintenance Fees

Fee	Large entity fee	small entity fee	micro entity fee	due date
7.5 Year Payment	$3600.00	$1800.00	$900.00	Sep 13, 2025
11.5 Year Payment	$7400.00	$3700.00	$1850.00	Sep 13, 2029

Fee	Large entity fee	small entity fee	micro entity fee
Surcharge - 7.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge - 11.5 year - Late payment within 6 months	$160.00	$80.00	$40.00
Surcharge after expiration - Late payment is unavoidable	$700.00	$350.00	$175.00
Surcharge after expiration - Late payment is unintentional	$1,640.00	$820.00	$410.00

Full Text

US Patent No: 9726563

Device member including cavity and method of producing the device member including cavity

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Abstract

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A device member including a cavity, includes a base member, an interlayer, an upper layer, an opening portion, and a gas-permeable sealing layer. The base member includes a first semiconductor. The interlayer is formed on the base member and is non-conductive. The upper layer is formed on the interlayer and includes a second semiconductor. The opening portion is formed at the upper layer. The gas-permeable sealing layer is formed to seal the opening portion formed at the upper layer. The cavity is formed by removing the interlayer with an etching gas that penetrates through the sealing layer.

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Description

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Claims

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Claims data not available

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Legal Events

 

• MAFP2024
• MAFP2021
• I2017
• STCF2017
• P2015
• AS2015
• F2013
• PD2012

Date	Code	Event	Description
Dec 30, 2024	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 8
Jan 27, 2021	MAFP	MAINTENANCE FEE PAYMENT	free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY year of fee payment: 4
Aug 08, 2017	I	Issuance
Jul 19, 2017	STCF	INFORMATION ON STATUS: PATENT GRANT	free format text: PATENTED CASE
Jul 30, 2015	P	Published
Mar 23, 2015	AS	ASSIGNMENT	free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FUJITA, HIROYUKI;TOSHIYOSHI, HIROSHI;MITSUYA, HIROYUKI;SIGNING DATES FROM 20150212 TO 20150218;REEL/FRAME:035230/0559 Owner name: KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO, JAPAN free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FUJITA, HIROYUKI;TOSHIYOSHI, HIROSHI;MITSUYA, HIROYUKI;SIGNING DATES FROM 20150212 TO 20150218;REEL/FRAME:035230/0559 Owner name: THE UNIVERSITY OF TOKYO, JAPAN
Jun 18, 2013	F	Filing
Sep 25, 2012	PD	Priority Date