Membrane substrate structure for single crystal acoustic resonator device
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United States of America Patent
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Mar 13, 2018
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app pub date -
Aug 26, 2014
filing date -
Aug 26, 2014
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Abstract
A substrate structure for an acoustic resonator device. The substrate has a substrate member comprising a plurality of support members configured to form an array structure. In an example, the substrate member has an upper region, and optionally, has a plurality of recessed regions configured by the support members. The substrate has a thickness of single crystal piezo material formed overlying the upper region. In an example, the thickness of single crystal piezo material has a first surface region and a second surface region opposite of the first surface region.
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