Composite substrate, production method thereof, and acoustic wave device
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United States of America Patent
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Mar 13, 2018
Grant Date -
Oct 1, 2015
app pub date -
Jun 12, 2015
filing date -
Dec 26, 2012
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Abstract
A composite substrate production method of the invention includes (a) a step of mirror polishing a substrate stack having a diameter of 4 inch or more, the substrate stack including a piezoelectric substrate and a support substrate bonded to each other, the mirror polishing being performed on the piezoelectric substrate side until the thickness of the piezoelectric substrate reaches 3 μm or less; (b) a step of creating data of the distribution of the thickness of the mirror-polished piezoelectric substrate; and (c) a step of performing machining with an ion beam machine based on the data of the thickness distribution so as to produce a composite substrate have some special technical features.
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