Specimen loading method, specimen stage, and charged particle beam device
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United States of America Patent
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Mar 13, 2018
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Jun 18, 2015
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Jun 27, 2014
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Abstract
A specimen loading method for loading a specimen that contains water into a specimen chamber of a charged particle beam device, includes: a step (S100) of mounting the specimen on a specimen support; a step (S102) of covering a predetermined area of the specimen with a water retention material; a step (S104) of evacuating the specimen chamber in which the specimen having the predetermined area covered with the water retention material is placed; and a step (S106) of exposing the predetermined area covered with the water retention material.
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