Bi-directional association and graphical acquisition of time-based equipment sensor data and material-based metrology statistical process control data
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United States of America Patent
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Mar 13, 2018
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app pub date -
Oct 30, 2012
filing date -
Oct 31, 2011
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Abstract
A method and system for linking sensor data to metrology data and metrology data to sensor data is described herein. In one embodiment, a user selection of metrology data for a product is received, related process tool fault detection summary for the selected metrology data for the product is presented, a user selection of a process tool from the process tool fault detection summary is received, and related fault detection details for the selected process tool are presented.
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