System and method for modulation mapping
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United States of America Patent
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Mar 13, 2018
Grant Date -
May 12, 2016
app pub date -
Jan 15, 2016
filing date -
Aug 26, 2005
priority date (Note) -
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Abstract
Probing an integrated circuit (IC), by: electrically applying stimulation signal to said IC; scanning a selected area of said IC with a monochromatic beam; collecting beam reflection from the selected area of said IC, wherein the beam reflection correspond to modulation of the monochromatic beam by active devices of said IC; converting said beam reflection to an electrical probing signal; selecting a frequency or a band of frequencies of said probing signal; utilizing the probing signal to generate a spatial modulation map for various locations over the selected area of said IC; and displaying the spatial map on a monitor, wherein grey scale values correspond to modulation signal values.
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