Case isolated oil filled MEMS pressure sensor

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United States of America Patent

PATENT NO 9915577
SERIAL NO

14557841

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Abstract

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An oil filled pressure sensor is provided. The sensor includes a drift-stabilized pressure sensing element mounted to and electrically isolated from a header body, the pressure sensing element immersed in an oil filled cavity and temperature stabilized for sensing pressure in the cavity without substantial signal drift. A method of fabrication is provided.

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Patent Owner(s)

Patent OwnerAddress
SENSATA TECHNOLOGIES INC529 PLEASANT STREET ATTLEBORO MA 02703

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brodeur, Russell P Franklin, US 4 11
Strott, Douglas B Andover, US 11 155
Washburn, Keith R Natick, US 2 8

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