Pressure sensor and pressure detection device

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United States of America Patent

PATENT NO 9915576
SERIAL NO

15031574

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Abstract

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A pressure sensor includes: a fixed part; a ring-like oscillator that is supported on the fixed part by a plurality of support beams; a plurality of electrodes that are provided on the fixed part and arranged in an oscillating direction of the ring-like oscillator with a gap; electret films that are formed on either one of opposite surfaces of the ring-like oscillator and the electrodes.

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Patent Owner(s)

Patent OwnerAddress
KABUSHIKI KAISHA SAGINOMIYA SEISAKUSHO55-5 WAKAMIYA 2-CHOME NAKANO-KU TOKYO 165-0033
THE UNIVERSITY OF TOKYOBUNKYO-KU TOKYO 113-8654

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ashizawa, Hisayuki Sayama, JP 23 42
Fujita, Hiroyuki Tokyo, JP 290 3516
Hashiguchi, Gen Tokyo, JP 19 127
Mitsuya, Hiroyuki Sayama, JP 23 94

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