Method of manufacturing piezoelectric microactuators having wrap-around electrodes
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United States of America Patent
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Mar 6, 2018
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app pub date -
Jun 26, 2014
filing date -
Oct 4, 2012
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Abstract
A method of manufacturing a piezoelectric microactuator having a wrap-around electrode includes forming a piezoelectric element having a large central electrode on a top face, and having a wrap-around electrode that includes the bottom face, two opposing ends of the device, and two opposing end portions of the top face. The device is then cut through the middle, separating the device into two separate piezoelectric microactuators each having a wrap-around electrode.
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