Overlapping device, and overlapping method
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United States of America Patent
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Mar 6, 2018
Issued Date -
N/A
app pub date -
Apr 30, 2013
filing date -
Jun 25, 2012
priority date (Note) -
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status (Latency Note)
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Abstract
An overlapping device which is configured to detect the center positions of a substrate and a support which are held in a center position detecting portion, carry the substrate and the support from the center position detecting portion to an overlapping portion, and overlap the substrate and the support such that the detected center positions of the substrate and the support are overlapped in the overlapping portion.
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