Scanning probe lithography methods utilizing an enclosed sinusoidal pattern

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9911574
SERIAL NO

15235717

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Provided among other things are a scanning electron microscope, scanning transmission electron microscope, focused ion beam microscope, ion beam micromachining device, or scanning probe nanofabrication device, wherein the microscope or device is configured to move a substrate and a scanning modality relative to one another with an enclosed sinusoidal trajectory, and methods of operation.

First Claim

See full text

Other Claims data not available

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
THE TRUSTEES OF PRINCETON UNIVERSITY619 ALEXANDER ROAD SUITE 102 PRINCETON NJ 08540

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Wei Princeton, US 71 23
Yao, Nan Princeton, US 11 219

Cited Art Landscape

Load Citation

Patent Citation Ranking

  • 0 Citation Count
  • H01J Class
  • 0 % this patent is cited more than
  • 7 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges79715421524116522101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 70100 +010020030040050060070080090010001100120013001400150016001700

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Sep 6, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Sep 6, 2029