MEMS switch device and method of fabrication
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United States of America Patent
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Mar 6, 2018
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N/A
app pub date -
Jul 31, 2013
filing date -
Jul 31, 2013
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Abstract
A MEMS switch device including: a substrate layer; an insulating layer formed over the substrate layer; and a MEMS switch module having a plurality of contacts formed on the surface of the insulating layer, wherein the insulating layer includes a number of conductive pathways formed within the insulating layer, the conductive pathways being configured to interconnect selected contacts of the MEMS switch module.
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