Actuator control device, optical module, electronic apparatus, and actuator control method
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United States of America Patent
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Mar 6, 2018
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N/A
app pub date -
Jan 23, 2015
filing date -
Jan 27, 2014
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Abstract
A spectroscopic measurement apparatus includes an electrostatic actuator that is driven by applying a drive voltage, a gap detector that detects a dimension of a gap, a closed loop system that controls the drive voltage applied to the electrostatic actuator depending on a detection signal from the gap detector, and a gain setting unit that sets a gain in the closed loop system depending on drive characteristics of electrostatic actuator based on the detection signal of the gap detector.
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