Inspection unit, probe card, inspection device, and control system for inspection device
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United States of America Patent
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Mar 6, 2018
Issued Date -
N/A
app pub date -
Oct 29, 2013
filing date -
Oct 30, 2012
priority date (Note) -
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Abstract
An inspection unit in which a probe card is united with a connection body via a vacuum chamber. It prevents flatness of tips of probes provided on the probe card from worsening when the probe card is united with a connection body by suction force (negative pressure) of the vacuum chamber. The inspection unit includes a probe card with probes on a first surface and a connection body united with a second surface of the probe card via a first vacuum chamber. The first chamber is formed with a plurality of chambers.
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