Vibration angular velocity sensor
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United States of America Patent
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Mar 6, 2018
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app pub date -
Dec 20, 2012
filing date -
Dec 23, 2011
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Abstract
A vibration angular velocity sensor includes a substrate and a vibrator. The vibrator includes support members, linear drive beams, and a plurality of weight portions connected by the drive beams. The vibrator vibrates the plurality of weight portions by bending of the drive beams. The vibrator is fixed to the substrate through the support members at fixed points of the drive beam. A spring property of the support members is smaller than a spring property of the drive beams.
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