Thin film sensor
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United States of America Patent
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Mar 6, 2018
Grant Date -
May 5, 2016
app pub date -
May 8, 2014
filing date -
Jun 11, 2013
priority date (Note) -
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Abstract
A sensor (1) comprising a membrane, an isolation layer (3) arranged on the membrane, measuring electronics comprising a thin film circuit (4), e.g. in the form of a Wheatstone bridge, deposited on the isolation layer (3), and a power supply (14) arranged to supply a quasi-DC voltage to the thin film circuit (4) is disclosed. The sensor (1) is cost effective to manufacture, due to the thin film circuit (4), and corrosion effects are avoided, without having to apply a coating or passivation layer onto the thin film circuit (4), due to the quasi-DC voltage being supplied to the thin film circuit (4).
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