Infrared thermal sensor with beam without thermocouple

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United States of America Patent

PATENT NO 9909924
SERIAL NO

15107065

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Abstract

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An infrared thermal sensor for sensing infrared radiation is disclosed. The infrared thermal sensor comprises a substrate and a cap structure together forming a sealed cavity, a membrane arranged in said cavity for receiving infrared radiation (IR) through a window or aperture and a plurality of beams for suspending the membrane. At least one beam has a thermocouple arranged therein or thereon for measuring a temperature difference (ΔT) between the membrane and the substrate, the plurality of beams. Furthermore at least one beam is mechanically supporting the membrane without a thermocouple being present therein or thereon.

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Patent Owner(s)

Patent OwnerAddress
MELEXIS TECHNOLOGIES NVTRANSPORTSTRAAT 1 POORT WEST-LIMBURG 1371-1372 TESSENDERLO 3980

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Maes, Ben Lommel, BE 11 49
Van, Buggenhout Carl Aalst, BE 16 69
Van, Der Wiel Appolonius Jacobus Duisberg, BE 33 128

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