Vacuum pump
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United States of America Patent
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Mar 6, 2018
Grant Date -
Jan 15, 2015
app pub date -
Jul 11, 2014
filing date -
Jul 15, 2013
priority date (Note) -
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Abstract
A vacuum pump has a working space, a bearing space, a dividing wall arranged between the working space and the bearing space and at least one rotor shaft which extends through the dividing wall and which forms a gap with the dividing wall and having a blocking device for blocking between the working space and the bearing space. The blocking device is formed by a Siegbahn pump stage which is configured for providing a pump action passing through the gap between the working space and the bearing space.
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