Nano-aperture fabrication using template guided thermal dewetting

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United States of America Patent

PATENT NO 9909203
SERIAL NO

14873293

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Abstract

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A method for fabrication of metal film with nanoapertures is provided. The method includes the steps of providing a nanopatterned template including a plurality of nanostructures, depositing of the metal film onto the nanopatterned template, and thermally induced dewetting of the metal film to define the nanoapertures in the metal film by diffusion and reflow of the metal film.

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AGENCY FOR SCIENCE TECHNOLOGY AND RESEARCHSINGAPORE 138632

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Asbahi, Mohamed Singapore, SG 3 7
Lu, Liangxing Singapore, SG 1 2
Srinivasan, Bharathi Madurai Singapore, SG 1 2
Wang, Ying Min Singapore, SG 8 271
Yang, Joel Kwang Wei Singapore, SG 5 34
Zhang, Yong-Wei Singapore, SG 1 2

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