Transfer method, manufacturing method, device and electronic apparatus of MEMS
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United States of America Patent
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Mar 6, 2018
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Apr 1, 2015
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Apr 1, 2015
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Abstract
A transfer method, manufacturing method, device and electronic apparatus of MEMS. The method for MEMS transfer, comprising: depositing a laser-absorbing layer on a first surface of a laser-transparent carrier; forming a MEMS structure on the laser-absorbing layer; attaching the MEMS structure to a receiver; and performing a laser lift-off from the side of the carrier, to remove the carrier. A transfer of high-quality MEMS structure can be achieved in a simple, low cost manner.
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