Transfer system and transfer method
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United States of America Patent
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Mar 6, 2018
Grant Date -
Apr 20, 2017
app pub date -
Oct 12, 2016
filing date -
Oct 15, 2015
priority date (Note) -
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status (Latency Note)
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Abstract
A transfer system includes a robot including a hand configured to transfer a substrate, a transfer chamber within which the robot is disposed, a plurality of substrate-storing cassettes disposed side by side on a sidewall of the transfer chamber in a plan view, and a robot control device configured to control an operation of the robot based on teaching information. The robot control device includes an operation controller configured to cause the robot to transfer the substrate to a storage position while slanting a hand centerline toward the robot away from a storage centerline with respect to a first cassette and while superimposing the hand centerline on the storage centerline with respect to a second cassette.
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