Method for providing sequential power pulses

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United States of America Patent

PATENT NO 9906210
SERIAL NO

14354698

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Abstract

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The present invention relates to a method for providing power pulses for PVD sputter cathodes which comprise a power consumption component and a cathode element, wherein during a power increase interval for a generator the power on the power consumption component is decreased and then the power on the cathode element is decreased, with changeover being effected such that the power draw from the generator providing the power does not have to be interrupted.

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Patent Owner(s)

Patent OwnerAddress
OERLIKON SURFACE SOLUTIONS AG PFÄFFIKONSWISS HOLE PFAFFIKON ZURICH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Krassnitzer, Siegfried Feldkirch, AT 65 272
Lechthaler, Markus Feldkirch, AT 17 79
Lendi, Daniel Grabs, CH 8 107

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