Substrate transferring apparatus
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United States of America Patent
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Feb 27, 2018
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app pub date -
Nov 6, 2013
filing date -
Nov 6, 2013
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Abstract
Substrate transferring apparatus includes a first-hand mechanism and second hand mechanism. The first-hand mechanism includes a first lower arm, first upper arm, first-hand having a tip end portion as a first substrate holding portion, and first driven mechanism to rotate the first-hand with rotation of the first upper arm. The first-hand mechanism so the first substrate holding portion movable by rotations of the first lower arm, first upper arm, and first-hand between a contracted and extended positions. The second-hand mechanism includes a second lower arm, second upper arm, second-hand having a tip end portion as a second substrate holding portion, and second driven mechanism to rotate the second-hand with rotation of the second upper arm. The second-hand mechanism so the second substrate holding portion movable by rotations of the second lower arm, second upper arm, and second-hand in sync with the first substrate holding portion between a contracted and extended positions.
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