Curved post scan electrode

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United States of America Patent

PATENT NO 9905396
SERIAL NO

15296242

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Abstract

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An apparatus an ion beam generator to provide an ion beam. A scanning system may receive the ion beam and provide a scanned beam. An electrode may receive the scanned beam. At least a portion of the electrode is normal to a propagation direction of the scanned beam. The portion of the electrode that is normal to the propagation direction the scan beam may have a curved shape.

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Patent Owner(s)

Patent OwnerAddress
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES INC35 DORY ROAD GLOUCESTER MA 01930

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bell, Edward W Newbury, US 5 10
Lindberg, Robert Rockport, US 9 67
Sinclair, Frank Boston, US 175 875
Tieger, Daniel Manchester, US 11 19

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