Pressure sensor comprising first pressure sensitive element and second pressure sensitive element
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United States of America Patent
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Feb 27, 2018
Grant Date -
Sep 29, 2016
app pub date -
Mar 21, 2016
filing date -
Mar 25, 2015
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Abstract
A pressure sensor according to an aspect of the present disclosure includes: a first pressure sensitive element including a first conductive layer including first projections having conductivity, first wiring layers, and a first dielectric layer provided between the first projections and the first wiring layers; and a second pressure sensitive element including a second conductive layer including second projections having conductivity, second wiring layers, and a second dielectric layer provided between the second projections and the second wiring layers. The first pressure sensitive element and the second pressure sensitive element are stacked on each other.
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