Method and apparatus for gas flow control
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United States of America Patent
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Feb 27, 2018
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app pub date -
Sep 2, 2014
filing date -
Oct 15, 2009
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Abstract
A method and apparatus for self-calibrating control of gas flow. The gas flow rate is initially set by controlling, to a high degree of precision, the amount of opening of a flow restriction, where the design of the apparatus containing the flow restriction lends itself to achieving high precision. The gas flow rate is then measured by a pressure rate-of-drop upstream of the flow restriction, and the amount of flow restriction opening is adjusted, if need be, to obtain exactly the desired flow.
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