Substrate laminating apparatus, substrate laminating method, and stereoscopic display device
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United States of America Patent
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Feb 27, 2018
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Mar 6, 2015
filing date -
Mar 6, 2014
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Abstract
To provide a substrate laminating apparatus and a substrate laminating method capable of laminating two substrates highly precisely while achieving low cost and saving space. The substrate laminating apparatus includes an upper-substrate camera group provided to a lower vacuum chamber for capturing an image of an upper substrate fixed to an upper vacuum chamber. The upper-substrate camera group captures images of a first upper-substrate alignment mark and a second upper-substrate alignment mark of the upper substrate fixed to the upper vacuum chamber by actions synchronized with the lower vacuum chamber. Thereby, it is possible to save the space and to lower the cost by reducing the number of mechanical components.
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