Thermal poling method, piezoelectric film and manufacturing method of same, thermal poling apparatus, and inspection method of piezoelectric property

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United States of America Patent

PATENT NO 9903898
SERIAL NO

14578907

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Abstract

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A thermal poling method in which a poling treatment can be performed easily by a dry process. The poling treatment is performed on a PZT film by performing a heat treatment on the PZT film under a pressurized oxygen atmosphere at a temperature of 400° C. or more and 900° C. or less. The PZT film before the heat treatment has a single-domain crystal structure, and the PZT film after the heat treatment has a multi-domain crystal structure.

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Patent Owner(s)

Patent OwnerAddress
I-PEX PIEZO SOLUTIONS INC2-1-17 ASUTOPIA UBE-SHI YAMAGUCHI

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Honda, Yuuji Chiba, JP 53 491
Kijima, Takeshi Chiba, JP 167 1581
Ogihara, Hiroyuki Chiba, JP 4 4
Shigenai, Takekazu Chiba, JP 4 13

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