FET type gas-sensitive device having horizontal floating gate
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United States of America Patent
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Feb 27, 2018
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app pub date -
Nov 6, 2013
filing date -
Nov 11, 2011
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Abstract
A FET type gas-sensitive device has a floating electrode formed in a horizontal direction. The device achieves noise reduction, process simplification, pollution control, sensing speed improvement, various sensing material applicability and mechanical stability etc. in comparison with a gas-sensitive device that is vertically stacked with a floating electrode, a sensing material layer and a control electrode. The device can be assembled easily with a plurality of gas-sensitive devices being operated by various sensing mechanisms in one substrate.
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