Method and apparatus for the non-contact support of a sensor and/or actuator device
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United States of America Patent
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Feb 27, 2018
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N/A
app pub date -
Jul 22, 2014
filing date -
Jul 22, 2013
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Abstract
A method and an apparatus for the non-contact support of a sensor and/or actuator device with respect to a substrate which reflects sound at least in regions has a moving suspension device, a sensor and/or actuator device which is mechanically connected to the suspension device, and a positioning device which is mechanically connected to the suspension device and which has at least one non-contact bearing for the non-contact support of the sensor and/or actuator device with respect to the substrate. The positioning device has at least one sonotrode for emitting an ultrasonic field which, between the sonotrode and the substrate, forms acoustic levitation waves for the non-contact support of the sensor and/or actuator device with respect to the substrate by a non-contact bearing which is designed as an ultrasonic bearing.
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