Sealing member and substrate processing apparatus including the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9903651
SERIAL NO

14556969

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A sealing member includes a body having a ring shape, a lower contacting portion protruding from a lower end of the body and having at least one recess, the recess provided in a lower surface of the lower contacting portion and extending in a radial direction of the body, and an outer contacting portion protruding outwards from the body along an outer side portion of the body.

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Patent Owner(s)

Patent OwnerAddress
SAMSUNG ELECTRONICS CO LTD129 SAMSUNG-RO YEONGTONG-GU SUWON-SI GYEONGGI-DO 16677 REPUBLIC OF KOREA

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Yong-Jhin Hwaseong-si, KR 27 103
Hong, Jin-Suk Hwaseong-si, KR 6 45
Jeong, Ji-Hoon Suwon-si, KR 19 49
Jun, Yong-Myung Hwaseong-si, KR 6 20
Ko, Yong-Sun Suwon-si, KR 83 643
Lee, Il-Sang Hwaseong-si, KR 14 51
Lee, Kun-Tack Suwon-si, KR 62 1061

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