Micro-position gap sensor assembly

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United States of America Patent

PATENT NO 9903507
SERIAL NO

15614477

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Abstract

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A micro-position gap sensor assembly, including a structural housing, a flexible diaphragm fixedly attached at a first end of the structural housing, and a shaft orthogonally attached to the flexible diaphragm. The micro-position gap sensor assembly may further include a first retainer coupled to the shaft, a second retainer formed as a step of the structural housing, and a plate gap sensor. The plate gap sensor may include a non-contact sensor plate biased by a compression spring so that the non-contact sensor plate is held against a portion of the second retainer. The plate gap sensor may further include a target plate positioned adjacent the non-contact sensor plate and separated therefrom by a gap. The target plate may be biased by a return spring so that the target plate is held against a portion of the first retainer. The target plate may be coupled to the shaft.

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Patent Owner(s)

Patent OwnerAddress
HORIBA STEC CO LTD11-5 HOKOTATE-CHO KAMITOBA MINAMI-KU KYOTO-SHI KYOTO 601-8116

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dick, John Thomas Reno, US 3 8
Kramer, Michael Alex Sparks, US 2 2
Lowery, Patrick Allen Reno, US 3 8

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