Thermistor made of metal nitride material, method for producing same, and film type thermistor sensor

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United States of America Patent

PATENT NO 9903013
SERIAL NO

14652739

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Abstract

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Provided are a metal nitride material for a thermistor, which has a high reliability and a high heat resistance and can be directly deposited on a film or the like without firing, a method for producing the same, and a film type thermistor sensor. The metal nitride material for a thermistor consists of a metal nitride represented by the general formula: (Ti1-wCrw)xAlyNz (where 0.0

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Patent Owner(s)

Patent OwnerAddress
MITSUBISHI MATERIALS CORPORATIONTOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujita, Toshiaki Naka, JP 44 312
Nagatomo, Noriaki Naka, JP 31 111
Tanaka, Hiroshi Naka, JP 1068 12184

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