Miniature MEMS actuator assemblies
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United States of America Patent
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Feb 20, 2018
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N/A
app pub date -
Jun 22, 2015
filing date -
Nov 15, 2010
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Abstract
In one embodiment, an electrostatic actuator includes a generally planar fixed frame, a generally planar moving frame coupled to the fixed frame by a flexure for substantially coplanar, perpendicular movement relative to the fixed frame, a plurality of interdigitated teeth, a fixed portion of which is attached to the fixed frame and a moving portion of which is attached to the moving frame, and an elongated output shaft having opposite input and output ends, the input end being coupled to the moving frame.
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