Laser apparatus having temperature control function for maintenance work
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United States of America Patent
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Feb 20, 2018
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N/A
app pub date -
Aug 18, 2016
filing date -
Aug 24, 2015
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Abstract
A laser apparatus able to prevent the formation of condensation at the time of maintenance work. The laser apparatus includes a housing having an openable sealed structure, an optical system set inside the housing, a temperature regulation mechanism maintaining the optical system at a predetermined temperature, and a preparatory step controller controlling a preparatory step performed before opening the housing. The temperature regulation mechanism is configured to maintain the optical system at a first temperature during operation of the laser apparatus and to maintain the optical system at a second temperature of the first temperature or more when the preparatory step is started.
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