Gas distributor used in wafer carriers

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United States of America Patent

PATENT NO 9899246
SERIAL NO

14735126

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Abstract

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The present invention relates to gas distributors used in wafer carriers. The gas distributors comprise a body having an interior space, a separator configured at the front side of the body in the interior space, and an air inlet connected with the body. One edge of the separator and the front side of the body together form a passage. The configuration of the passage in the gas distributors enables the gas distributors to evenly distribute gases.

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Patent Owner(s)

Patent OwnerAddress
GUDENG PRECISION INDUSTRIAL CO LTDNEW TAIPEI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chen-Hao New Taipei, TW 16 53
Chiu, Ming-Chien New Taipei, TW 120 362
Kao, Jui-Ken New Taipei, TW 3 9
Lin, Chin-Ming New Taipei, TW 29 245

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