Hybrid extreme ultraviolet imaging spectrometer

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United States of America Patent

PATENT NO 9899197
APP PUB NO 20170062198A1
SERIAL NO

15226307

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Abstract

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A hybrid extreme ultraviolet (EUV) imaging spectrometer includes: a radiation source to: produce EUV radiation; subject a sample to the EUV radiation; photoionize a plurality of atoms of the sample; and form photoions from the atoms subject to photoionization by the EUV radiation, the photoions being desorbed from the sample in response to the sample being subjected to the EUV radiation; an ion detector to detect the photoions: as a function of a time-of-arrival of the photoions at the ion detector after the sample is subjected to the EUV radiation; or as a function of a position of the photoions at the ion detector; an electron source to: produce a plurality of primary electrons; subject the sample to the primary electrons; and form scattered electrons from the sample in response to the sample being subjected to the primary electrons; and an electron detector to detect the scattered electrons: as a function of a time-of-arrival of the scattered electrons at the electron detector after the sample is subjected to the EUV radiation or the primary electrons; or as a function of a position of the scattered electrons at the electron detector.

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Patent Owner(s)

Patent OwnerAddress
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCENATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY 100 BUREAU DRIVE MS 2200 GAITHERSBURG MD 20899

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiaramonti, Debay Ann Louisville, US 2 8
Diercks, David R Littleton, US 1 4
Gorman, Brian P Golden, US 2 5
Sanford, Norman A Boulder, US 18 250

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