Capacitive pressure sensor
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United States of America Patent
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Feb 20, 2018
Issued Date -
N/A
app pub date -
Nov 25, 2014
filing date -
Nov 25, 2013
priority date (Note) -
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Abstract
Provided is a capacitive pressure sensor that prevents not only a change in temperature but also electromagnetic noise in the air from affecting the measurement value of pressure. In the capacitive pressure sensor, an electrode member includes: a measurement electrode fixed to an insulating positioning member and having an electrode face; a signal extraction electrode fixed with an insulating seal sealing the other end of the body; and a flexible connection member for electrically connecting the measurement electrode and the signal electrode. Moreover, the flexible connection member is accommodated in the accommodating depressed portion formed in the measurement electrode or the signal extraction electrode.
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