Combined leg structure of micro bridge unit of focal plane array
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United States of America Patent
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Feb 20, 2018
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N/A
app pub date -
Dec 9, 2015
filing date -
Aug 26, 2015
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Abstract
A combined leg structure of a micro bridge unit of a focal plane array adopts a conductive polymer film or a doped conductive polymer film to serve as an extraction electrode in the micro bridge unit of the focal plane array, which contacts a vanadium oxide thermosensitive film or a doped vanadium oxide thermosensitive film of a bridge surface layer, so as to electrically connect the thermosensitive film of the micro bridge unit with a read-out circuit. The combined leg structure includes three layers: respectively an upper SiNx film layer, a lower SiNx film layer and a middle layer of the conductive polymer film or the doped conductive polymer film. The present invention adopts the conductive polymer film or the doped conductive polymer film having a low thermal conductivity to serve as an electrode material. A bridge leg absorption structure is arranged in the combined leg structure.
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