Method and system for quadrature error compensation
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United States of America Patent
Stats
-
Feb 20, 2018
Issued Date -
N/A
app pub date -
Jun 8, 2015
filing date -
May 26, 2011
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The present invention concerns an MEMS sensor and a method for compensation of a quadrature error on an MEMS sensor, which is intended for detection of movements of a substrate, especially accelerations and/or rotation rates. At least one mass arranged on the substrate and mounted to move relative to it is driven by means of drive electrodes. The mass/es execute a movement deviating from the prescribed movement due to a quadrature error. A deflection of the mass/es occurring due to Coriolis force and quadrature error is detected with detection electrodes. It is proposed according to the invention that a capacitance change be detected as a function of drive movement of the mass/es by means of compensation electrodes. A compensation charge dependent on the quadrature error of the MEMS sensor is generated on the compensation electrodes. For compensation, the distorted or incorrect charge generated by the quadrature error in the detection electrodes is compensated with the compensation charge.
First Claim
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International Classification(s)
- 2015 Application Filing Year
- G01P Class
- 782 Applications Filed
- 557 Patents Issued To-Date
- 71.23 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 1 Citation Count
- G01P Class
- 18.75 % this patent is cited more than
- 7 Age
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