Method for pretreatment of base substrate and method for manufacturing layered body using pretreated base substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 9896780
SERIAL NO

14905559

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Provided is a method for pretreatment of a group III nitride single crystal substrate having a high Al composition ratio, for manufacturing a high-quality group III nitride thin film.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
STANLEY ELECTRIC CO LTD2-9-13 NAKAMEGURO MEGURO-KU TOKYO 153-8636

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Furuya, Hiroshi Shunan, JP 38 358
Obata, Toshiyuki Shunan, JP 22 93

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 20, 2025
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 20, 2029
Fee Large entity fee small entity fee micro entity fee
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00