Apparatus for heat treating an optical ceramic material, method for heat treating an optical ceramic material, method for heat treating synthetic silica glass, method for producing an optical system, and method for producing an exposure apparatus
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United States of America Patent
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Feb 20, 2018
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app pub date -
Sep 3, 2013
filing date -
Mar 2, 2011
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Abstract
An optical ceramic material heat treatment apparatus, comprising: a furnace body that is capable to contain an optical ceramic material to be heat treated in the inside thereof; a temperature drop control heater that generates heat during dropping a temperature of the optical ceramic material; a refrigerant intake unit that introduces a refrigerant into the inside of the furnace body to flow the refrigerant therein; and a control unit that controls the temperature drop rate, wherein the temperature drop control heater is arranged in the inside of the furnace body and/or in the refrigerant intake unit, the control unit controls at least one of an amount of heat generation of the temperature drop control heater, and a flow rate of the refrigerant in the inside of the furnace body to control a temperature drop rate at the optical ceramic material or in the vicinity thereof to be kept in a predetermined profile.
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