Compliant micro device transfer head

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United States of America Patent

PATENT NO 9895902
SERIAL NO

15279083

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Abstract

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A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.

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Patent Owner(s)

Patent OwnerAddress
APPLE INCCALIFORNIA USA CALIFORNIA

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bibl, Andreas Los Altos, US 271 12094
Higginson, John A Santa Clara, US 106 3810
Hu, Hsin-Hua Los Altos, US 80 5532

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