Laser processing apparatus

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United States of America Patent

PATENT NO 9895768
SERIAL NO

14840742

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A laser processing apparatus includes a laser beam applying unit having a processing head for applying a laser beam to a workpiece held on a chuck table, a moving unit for relatively moving the chuck table and the laser beam applying unit, a controller for controlling the laser beam applying unit and the moving unit, an input unit for inputting a desired processing result, and a three-dimensional imaging unit for imaging a processed condition of the workpiece held on the chuck table to form a three-dimensional image. The controller adjusts processing conditions so as to obtain the desired processing result input by the input unit according to the desired processing result and the three-dimensional image formed by the three-dimensional imaging unit, and then controls the laser beam applying unit and the moving unit according to the processing conditions adjusted in the processing conditions adjusting step.

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Patent Owner(s)

Patent OwnerAddress
DISCO CORPORATION13-11 OMORI-KITA 2-CHOME OTA-KU TOKYO 143-8580

International Classification(s)

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  • 2015 Application Filing Year
  • B23K Class
  • 2354 Applications Filed
  • 1765 Patents Issued To-Date
  • 74.98 % Issued To-Date
Click to zoom InYear of Issuance% of Matters IssuedCumulative IssuancesYearly Issuances20152016201720182019202020212022202320240255075100

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ito, Yusaku Tokyo, JP 22 65
Kuki, Junichi Tokyo, JP 10 31

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Patent Citation Ranking

  • 2 Citation Count
  • B23K Class
  • 37.97 % this patent is cited more than
  • 7 Age
Citation count rangeNumber of patents cited in rangeNumber of patents cited in various citation count ranges4727054712411101 - 1011 - 2021 - 3031 - 4041 - 5051 - 6061 - 70050100150200250300350400450500550600650700750

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