Extreme ultraviolet light generation apparatus
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United States of America Patent
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Feb 13, 2018
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app pub date -
Mar 7, 2016
filing date -
Oct 28, 2013
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Abstract
An extreme ultraviolet light generation apparatus may include: a chamber in which extreme ultraviolet light is generated when a target is irradiated with a laser beam inside the chamber; a target supply part configured to supply the target into the chamber; and a target collector configured to collect the target which is supplied by the target supply part but is not irradiated with the laser beam in a collection container, by receiving the target on a receiving surface having a contact angle of greater than 90 degrees with the target.
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