Extreme ultraviolet light generation apparatus
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United States of America Patent
Stats
-
Feb 13, 2018
Issued Date -
N/A
app pub date -
Dec 30, 2015
filing date -
Mar 30, 2011
priority date (Note) -
In Force
status (Latency Note)
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Abstract
An apparatus for generating extreme ultraviolet light may include: a chamber having an opening through which a laser beam is introduced into the chamber; a reference member on which the chamber is mounted; a target supply unit for supplying a target material to be irradiated by the laser beam to a predetermined region inside the chamber; a laser beam focusing optical system for focusing the laser beam in the predetermined region inside the chamber to turn the target material into plasma; and a collector mirror for collecting the extreme ultraviolet light emitted from the plasma.
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International Classification(s)
- 2015 Application Filing Year
- H05G Class
- 239 Applications Filed
- 205 Patents Issued To-Date
- 85.78 % Issued To-Date
Cited Art Landscape
Patent Citation Ranking
- 0 Citation Count
- H05G Class
- 0 % this patent is cited more than
- 7 Age
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 7.5 Year Payment | $3600.00 | $1800.00 | $900.00 | Aug 13, 2025 |
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | Aug 13, 2029 |
