Resonant transducer and manufacturing method of resonant transducer
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United States of America Patent
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Feb 13, 2018
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Jan 13, 2014
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Jan 11, 2013
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Abstract
A resonant transducer includes a resonator, a resonator electrodes connected to an end part of the resonator, at least one fixed electrode arranged in the vicinity of the resonator, and a buried part formed between the fixed electrode and the resonator electrode. The resonator, the resonator electrodes and the fixed electrode are formed by the same active layer on a substrate.
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