Methods of manufacturing a magnetic field sensor
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United States of America Patent
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Feb 13, 2018
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app pub date -
Dec 22, 2016
filing date -
Mar 31, 2010
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Abstract
A semiconductor process integrates three bridge circuits, each include magnetoresistive sensors coupled as a Wheatstone bridge on a single chip to sense a magnetic field in three orthogonal directions. The process includes various deposition and etch steps forming the magnetoresistive sensors and a plurality of flux guides on one of the three bridge circuits for transferring a “Z” axis magnetic field onto sensors orientated in the XY plane.
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